JPS616538B2 - - Google Patents
Info
- Publication number
- JPS616538B2 JPS616538B2 JP4921877A JP4921877A JPS616538B2 JP S616538 B2 JPS616538 B2 JP S616538B2 JP 4921877 A JP4921877 A JP 4921877A JP 4921877 A JP4921877 A JP 4921877A JP S616538 B2 JPS616538 B2 JP S616538B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
- ing And Chemical Polishing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4921877A JPS53133370A (en) | 1977-04-27 | 1977-04-27 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4921877A JPS53133370A (en) | 1977-04-27 | 1977-04-27 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53133370A JPS53133370A (en) | 1978-11-21 |
| JPS616538B2 true JPS616538B2 (en]) | 1986-02-27 |
Family
ID=12824801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4921877A Granted JPS53133370A (en) | 1977-04-27 | 1977-04-27 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53133370A (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62163545U (en]) * | 1986-04-08 | 1987-10-17 |
-
1977
- 1977-04-27 JP JP4921877A patent/JPS53133370A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62163545U (en]) * | 1986-04-08 | 1987-10-17 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53133370A (en) | 1978-11-21 |